IGZO Annealing Oven
- MAX. temperature：450℃
- Temperature uniformity：±3℃
- O2 control：3%~30%, ±1%
- Humidity control：Absolute humidity 5%~30%, ±1%
- Cleanliness level：Class 10
- Multi-step temperature control
- Recipe edit
- Hot-air circulation or hot plate oven available
- High/low O2 control or high humidity control capable
- Cleanliness level: class 10
- Available from G3.5 to G10.5
- Waste heat recovery system equipped,
- Apply APC to collect EQ data. Real time error diagnose and classify
Downloads
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